Low power consumption silicon optoelectronics based on strain and refractive index engineering
ERC Consolidator Grant (2015-2020)
People involved in the POPSTAR project: Guillaume AGNUS (Ass. Prof.), Daniel BENEDIKOVIC (Post-Doc), Mathias BERCIANO (PhD), Eric CASSAN (Prof.), Pedro DAMAS (PhD), Christian Lafforgue (PhD), Ludovic LARGEAU (Ing. CNRS), Philippe LECOEUR (Prof.), Xavier LE ROUX (Ing. CNRS), Guillaume MARCAUD (PhD), Thomas MAROUTIAN (CNRS researcher), Sylvia MATZEN (Ass. Prof.), Alicia Ruiz-Caridad (PhD), Laurent VIVIEN (DR CNRS, PI)
Summary: POPSTAR project aims at building a new class of silicon optoelectronic devices for high speed multiple wavelength optical links for data communication applications including optical interconnects and high performance computing systems. The goal is to develop a new approach based on both strain and refractive index engineering concepts using subwavelength silicon nanostructures. The main general breakthrough that we will be focusing on in the framework of this project is the drastic reduction of the power consumption of all optoelectronic building blocks. 3D strain will be exploited inside and along silicon waveguide which leads to a significant improvement of second-order nonlinearities efficiency and will modify the band-gap energy in order to modify two photon absorption process in silicon.
We will address the implementation of strain in silicon from two approaches: (i) using sub-λ structuration of silicon along and transversal to the waveguide to bring up both x- and z-axis strain components, usually considered negligible, as strong as the vertical component (y-axis) and (ii) developing strain engineering based on the use of functional oxides including YSZ which exhibit more appropriate strain-induced characteristics in silicon than the use of Si3N4. From both approaches, electrical and optical properties will be modified and adapted for three major cornerstones: (i) a 40Gbit/s optical modulators based on Pockels effect, (ii) a high responsivity, low dark-current, low bias voltage and high bandwidth Si photodetector and (iii) a low threshold tunable optical parametric oscillator source. The final objective will also be to implement these concepts on the development of high-speed multiple wavelength photonic circuits integrating strain sub-λ silicon optoelectronic devices.
Journals:
[1] D. Benedikovic, C. Alonso-Ramos, P. Cheben, J. H. Schmid, Sh. Wang, R. Halir, A. Ortega-Moñux, L. Vivien, D.-X. Xu, J. Lapointe, S. Janz, and M. Dado, “Single-etch subwavelength engineered fiber-chip grating couplers for 1.3 μm datacom wavelength band,” Optics Express, Volume 24, Issue 12, pp. 12893 – 12904, June 2016. https://hal.archives-ouvertes.fr/hal-01523518
[2] D. Benedikovic, C. Alonso-Ramos, D. Pérez-Galacho, S. Guerber, V. Vakarin, G. Marcaud, X. Le Roux, E. Cassan, D. Marris-Morini, P. Cheben, F. Boeuf, C. Baudot, and L. Vivien, “L-shaped fiber-chip grating couplers with high-directionality and low-reflectivity fabricated with deep-UV lithography,” Optics Letters, Volume 42, Issue 17, pp. 3439 – 3442, August 2017. https://hal.archives-ouvertes.fr/hal-01800599
[3] D. Benedikovic, M. Berciano, C. Alonso-Ramos, X. Le Roux, E. Cassan, D. Marris-Morini, and L. Vivien, “Dispersion control of silicon nanophotonic waveguides using sub-wavelength grating metamaterials in near- and mid-IR wavelengths,” Optics Express, Volume 25, Issue16, pp. 19468 – 19478, August 2017. https://hal.archives-ouvertes.fr/hal-01800600
[4] L. Virot, D. Benedikovic, B. Szelag, C. Alonso-Ramos, B. Karakus, J.-M. Hartmann, X. Le Roux, P. Crozat, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, J.-M. Fédéli, C. Kopp, and L. Vivien, “Integrated waveguide PIN photodiodes exploiting lateral Si/Ge/Si heterojunction,” Optics Express, Volume 25, Issue 16, pp. 19487 – 19496, August 2017. https://hal.archives-ouvertes.fr/hal-01800601
[5] D. Benedikovic, L. Virot, G. Aubin, F. Amar, B. Szelag, B. Karakus, J.-M. Hartmann, C. Alonso-Ramos, X. Le Roux, P. Crozat, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, J.-M. Fédéli, C. Kopp, and L. Vivien, “25 Gbps low-voltage hetero-structured silicon-germanium waveguide pin photodetectors for monolithic on-chip nanophotonic architectures,” Photonics Research, Volume 7, Issue 4, pp. 437 – 444, April 2019. https://hal.archives-ouvertes.fr/hal-02543320
[6] D. Benedikovic, C. Alonso-Ramos, Sylvain Guerber, X, Le Roux, P. Cheben, C. Dupre, B. Szelag, D. Fowler, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, and Laurent Vivien, “Sub-decibel silicon grating couplers based on L-shaped waveguides and engineered subwavelength metamaterials,” Optics Express, Volume 27, Issue 18, pp. 26239 – 26250, August 2019. https://hal.archives-ouvertes.fr/hal-02539628
[7] D. Benedikovic, L. Virot, G. Aubin, J.-M. Hartmann, F. Amar, B. Szelag, X. Le Roux, C. Alonso-Ramos, P. Crozat, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, J.-M. Fédéli, C. Kopp, and L. Vivien, “Comprehensive Study on Chip-Integrated Germanium Pin Photodetectors for Energy-Efficient Silicon Interconnects,” IEEE Journal of Quantum Electronics, Volume 56, Issue 1, Article Sequence Number: 8400409, February 2020.https://hal.archives-ouvertes.fr/hal-02539609
[8] D. Benedikovic, L. Virot, G. Aubin, J.-M. Hartmann, F. Amar, X. Le Roux, C. Alonso-Ramos, P. Crozat, E. Cassan, D. Marris-Morini, F. Boeuf, J.-M. Fédéli, C. Kopp, B. Szelag, and L. Vivien, “40 Gbps heterostructure germanium avalanche photo receiver on a silicon chip,” Optica, Volume 7, Issue 7, pp. 775 – 783, July2020.https://hal.archives-ouvertes.fr/hal-02925845
[9] D. Pérez-Galacho, C. Alonso-Ramos, F. Mazeas, X. Le Roux, D. Oser, W. Zhang, D. Marris-Morini, L. Labonté, S. Tanzilli, É. Cassan, and L. Vivien, "Optical pump-rejection filter based on silicon sub-wavelength engineered photonic structures," Optics Letters, Volume 42, Issue 8, pp. 1468 – 1471, April 2017.https://hal.inria.fr/hal-01527014/
[10] E. Durán-Valdeiglesias, W. Zhang, C. Alonso-Ramos, S. Serna, X. Le Roux, D. Marris-Morini, N. Caselli, F. Biccari, M. Gurioli, A. Filoramo, E. Cassan, and Laurent Vivien, "Tailoring carbon nanotubes optical properties through chirality-wise silicon ring resonators," Scientific Reports, Volume 8, Issue 1, Article number: 11252, July 2018. https://hal.archives-ouvertes.fr/cea-01855340
[11] C. Alonso-Ramos, X. Le Roux, J. Zhang, D. Benedikovic, V. Vakarin, E. Durán-Valdeiglesias, D. Oser, D. Pérez-Galacho, F. Mazeas, L. Labonté, S. Tanzilli, É. Cassan, D. Marris-Morini, P. Cheben, and L. Vivien, "Diffraction-less propagation beyond the sub-wavelength regime: a new type of nanophotonic waveguide," Scientific Reports Volume 9, Article number: 5347, March 2019. https://hal.archives-ouvertes.fr/hal-02413644
[12] D. González-Andrade, C. Lafforgue, E. Durán-Valdeiglesias, X. Le Roux, M. Berciano, E. Cassan, D. Marris-Morini, A. V. Velasco, P. Cheben, L. Vivien, and C. Alonso-Ramos, "Polarization- and wavelength-agnostic nanophotonic beam splitter," Scientific Reports, Volume 9, Article number: 3604, March 2019.https://hal.archives-ouvertes.fr/hal-02413631/
[13] E. Durán-Valdeiglesias, S. Guerber, D. Oser, X. Le Roux, D. Benedikovic, D. Pérez-Galacho, N. Vulliet, S. Cremer, S. Monfray, Eric Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, L. Vivien, and C. Alonso-Ramos, "Dual-polarization silicon nitride Bragg filters with low thermal sensitivity," Optics Letters, Volume 44, Issue 18, pp. 4578 – 4581, September 2019. https://hal.archives-ouvertes.fr/hal-02413918
[14] D. González-Andrade, S. Guerber, E. Durán-Valdeiglesias, D. Pérez-Galacho, X. Le Roux, N. Vulliet, S. Cremer, S. Monfray, E. Cassan, D. Marris-Morini, F. Boeuf, P. Cheben, L. Vivien, A. V. Velasco, and C. Alonso-Ramos, "Ultra-wideband dual-polarization silicon nitride power splitter based on modal engineered slot waveguides," Optics Letters, Volume 45, Issue 2, pp. 527 – 530, January 2020.https://hal.archives-ouvertes.fr/hal-02939743
[15] M. Berciano, G. Marcaud, P. Damas, X. Le Roux, P. Crozat, C. Alonso Ramos, D. Pérez Galacho, D. Benedikovic, D. Marris-Morini, E. Cassan, and L. Vivien, "Fast linear electro-optic effect in a centrosymmetric semiconductor," Communications Physics, Volume 1, Article number: 64, October 2018. https://hal.archives-ouvertes.fr/hal-02413586
[16] P. Damas, M. Berciano, G. Marcaud, C. Alonso Ramos, D. Marris-Morini, E. Cassan, and L. Vivien, "Comprehensive description of the electro-optic effects in strained silicon waveguides," Journal of Applied Physics, Volume 122, Article number: 153105, October 2017.https://hal.archives-ouvertes.fr/hal-01878844
[17] G. Marcaud, S. Matzen, C. Alonso-Ramos, X. Le Roux, M. Berciano, T. Maroutian, G. Agnus, P. Aubert, L. Largeau, V. Pillard, .l Serna, D. Benedikovic, C. Pendenque, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "High-quality crystalline yttria-stabilized-zirconia thin layer for photonic applications," Physical Review Materials, Volume 2, Issue 3, Article number 035202, March 2018.https://hal.archives-ouvertes.fr/hal-01801073
[18] G. Marcaud, S. Serna, K. Panaghiotis, C. Alonso-Ramos, X. Le Roux, M. Berciano, T. Maroutian, G. Agnus, P. Aubert, A. Jollivet, A. Ruiz-Caridad, L. Largeau, N. Isac, E. Cassan, S. Matzen, N. Dubreuil, M. Rérat, P. Lecoeur, and L. Vivien, "Third-order nonlinear optical susceptibility of crystalline oxide yttria-stabilized zirconia," Photonics Research, Volume 8, Issue 2, pp. 110 – 120, February 2020. https://hal.archives-ouvertes.fr/hal-02389837
[19] S. Guerber, C. Alonso-Ramos, D. Benedikovic, E. Durán-Valdeiglesias, X. Le Roux, N. Vulliet, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, and L. Vivien, “Broadband Polarization Beam Splitter on a Silicon Nitride Platform for O-Band Operation,” IEEE Photonics Technology Letters, Volume 30, Issue 19, pp. 1679 – 1682, October 2018.https://hal.archives-ouvertes.fr/hal-01940099
[20] A. Ruiz-Caridad, G. Marcaud, J.M. Ramirez, E. Durán-Valdeiglesias, C. Lafforgue, J. Zhang, L. Largeau, T. Maroutian, S. Matzen, C. Alonso-Ramos, S. Collin, G. Agnus, S. Guerber, C. Baudot, F. Boeuf, S. Monfray, S. Crémer, V. Vakarin, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, “Erbium-doped yttria-stabilised zirconia thin films grown by pulsed laser deposition for photonic applications,” Thin Solid Films, Volume 639, Article number: 1377062, January 2020.https://hal.inria.fr/hal-02415781/
[21] A. Ruiz-Caridad, G. Marcaud, J.M. Ramirez, L. Largeau, T. Maroutian, S. Matzen, S. Collin, C. Alonso-Ramos, G. Agnus, S. Guerber, C. Baudot, F. Boeuf, V. Vakarin, E. Duran-Valdeiglesias, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, “Erbium-doped Yttria-stabilized Zirconia thin layers for photonic applications,” IEEE Journal of Quantum Electronics, Volume 56, Issue 2, Article Sequence Number: 7000107, April 2020.https://hal.archives-ouvertes.fr/hal-02932964
[22] S. Serna, H. Lin, C. Alonso-Ramos, A. Yadav, X. Le Roux, K. Richardson, E. Cassan, N. Dubreuil, J. Hu, and L. Vivien, "Nonlinear optical properties of integrated GeSbS chalcogenide waveguides," Photonics Research, Volume 6, Issue 5, pp. B37 - B42, May 2018.https://hal.archives-ouvertes.fr/hal-02932238
[23] S. Serna, H. Lin, C. Alonso-Ramos, C. Lafforgue, X. Le Roux, K. A. Richardson, E. Cassan, N. Dubreuil, J. Hu, and L. Vivien, "Engineering third-order optical nonlinearities in hybrid chalcogenide-on-silicon platform," Optics Letters, Volume 44, Issue 20, pp. 5009 – 5012, October 2019.https://hal.archives-ouvertes.fr/hal-02333242
[24] C. Lafforgue, S. Guerber, J. M. Ramirez, G. Marcaud, C. Alonso-Ramos, X. Le Roux, D. Marris-Morini, E. Cassan, C. Baudot, F. Boeuf, S. Cremer, S. Monfray, and L. Vivien, "Broadband supercontinuum generation in nitrogen-rich silicon nitride waveguides using a 300 mm industrial platform," Photonics Research, Volume 8, Issue 3, pp. 352-358, March 2020.https://hal.archives-ouvertes.fr/hal-02932154
Conferences:
[1] D. Benedikovic, C. Alonso-Ramos, P. Cheben, J. H. Schmid, S. Wang, B. Lamontagne, D.-X. Xu, S. Janz, J. Lapointe, R. Halir, A. Ortega-Moñux, L. Vivien, J.-G. Wangüemert-Pérez, I. Molina-Fernández, J.-M. Fédéli, and M. Dado, “High-efficiency single etch step surface grating couplers engineered by subwavelength structured metamaterials,” In Proc.: 7th International Conference on Metamaterials, Photonic Crystals and Plasmonics 2016 (META 2016), Málaga, Andalucía, Spain, July 2016.https://hal.archives-ouvertes.fr/hal-01527366
[2] D. Benedikovic, C. Alonso-Ramos, P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, R. Halir, A. Ortega-Moñux, L. Vivien, J. Lapointe, S. Janz, J.-G. Wangüemert-Pérez, I. Molina-Fernández, J.-M. Fédéli, and M. Dado, “Highly efficient subwavelength engineered grating couplers for silicon-on-insulator waveguides,” In Proc.: 18th European Conference in Integrated Optics 2016 (ECIO 2016), Warsaw, Poland, May 2016. https://hal.archives-ouvertes.fr/hal-01527629
[3] D. Benedikovic, C. Alonso-Ramos, P. Cheben, J. H. Schmid, S. Wang, B. Lamontagne, D.-X. Xu, S. Janz, J. Lapointe, R. Halir, A. Ortega-Moñux, L. Vivien, J.-G. Wangüemert-Pérez, I. Molina-Fernández, J.-M. Fédéli, and Milan Dado, “High efficiency fiber-chip surface grating couplers,” In Proc.:18th IEEE Photonics North 2016, Québec city, Québec, Canada, May 2016.https://hal.archives-ouvertes.fr/hal-01527602
[4] D. Benedikovic, C. Alonso-Ramos, P. Cheben, J. H. Schmid, S. Wang, D.-X. Xu, B. Lamontagne, J. Lapointe, S. Janz, R. Halir, A. Ortega-Moñux, J.-G. Wangüemert-Pérez, I. Molina-Fernández, J.-M. Fédéli, M. Dado, and L. Vivien, “Fiber-chip surface grating couplers engineered by nanophotonic sub-wavelength grating metamaterials,” In Proc.: 8th International Conference on Metamaterials, Photonic Crystals and Plasmonics 2017 (META 2017), Seoul, South Korea, July 2017.https://hal.archives-ouvertes.fr/hal-01800596
[5] D. Benedikovic, M. Berciano, X. Le Roux, V. Vakarin, G. Marcaud, C. Alonso-Ramos, E. Cassan, D. Marris-Morini, and L. Vivien, “Sub-wavelength Silicon Grating Metamaterial Ring Resonators,” In Proc.: 14th IEEE International Conference on Group IV Photonics 2017 (GFP 2017), Berlin, Germany, August 2017.https://hal.archives-ouvertes.fr/hal-01876660
[6] D. Benedikovic, C. Alonso-Ramos, M. Berciano, X. Le Roux, E. Cassan, D. Marris-Morini, and L. Vivien, “Dispersion controlling in strained silicon waveguides using sub-wavelength grating metamaterials,” In Proc.: 19th European Conference in Integrated Optics 2017 (ECIO 2017), Eindhoven, Netherlands, April 2017.https://hal.archives-ouvertes.fr/hal-01527630
[7] L. Virot, D. Benedikovic, B. Szelag, C. Alonso-Ramos, J. M. Hartmann, P. Crozat, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, J. M. Fédéli, C. Kopp, and L. Vivien, “Low Power Consumption and High-Speed Ge Receivers,” In Proc.: Optical Fiber Communication Conference 2017 (OFC 2017), Los Angeles, California, USA, March 2017.https://hal.archives-ouvertes.fr/hal-01527376
[8] P. Cheben, D. Benedikovic, C. Alonso-Ramos, J. H. Schmid, R. Halir, A. Sánchez-Postigo, A. Ortega-Moñux, G. Wangüemert-Pérez, I. Molina-Fernández, J. M. Luque-Gonzalez, J. D. Sarmiento-Merenguel, D.-X. Xu, S. Janz, S. Wang, M. Vachon, X. Le Roux, E. Durán-Valdeiglesias, D. Marris-Morini, L. Vivien, A. V. Velasco, and M. Dado, “Subwavelength index engineered integrated photonic devices,” In Proc.: 16th IEEE International Conference on Optical Communications and Networks 2017 (ICOCN 2017), Wuzhen, China, August 2017.https://hal.archives-ouvertes.fr/hal-02937354
[9] D. Benedikovic, C. Alonso-Ramos, S. Guerber, D. Pérez-Galacho, V. Vakarin, G. Marcaud, X. Le Roux, E. Cassan, D. Marris-Morini, P. Cheben, F. Boeuf, C. Baudot, and L. Vivien, “Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultra-violet optical lithography,” In Proc.: SPIE Photonics Europe 2018, Strasbourg, France, April 2018.https://hal.archives-ouvertes.fr/hal-01800594
[10] D. Benedikovic, L. Virot, G. Aubin, F. Amar, B. Szelag, B. Karakus, J.-M. Hartmann, C. Alonso-Ramos, X. Le Roux, P. Crozat, D. Marris-Morini, E. Cassan, C. Baudot, F. Boeuf, J.-M. Fédéli, C. Kopp, and L. Vivien, “High-performance waveguide photodetectors based on lateral Si/Ge/Si heterojunction,” In Proc.: SPIE Photonics West 2019, San Francisco, California, USA, February 2019.https://hal.archives-ouvertes.fr/hal-02539498
[11] D. Benedikovic, M. Berciano, C. Alonso-Ramos, X. Le Roux, S. Guerber, G. Marcaud, V. Vakarin, D. Perez-Galacho, E. Cassan, D. Marris-Morini, P. Cheben, C. Baudot, F. Boeuf, and L. Vivien, “Enhanced performance of integrated silicon nanophotonic devices engineered by sub-wavelength grating structures,” In Proc.: SPIE Optics + Optoelectronics 2019, Prague, Czech Republic, April 2019.https://hal.archives-ouvertes.fr/hal-02539514
[12] D. Benedikovic, C. Alonso-Ramos, S. Guerber, V. Vakarin, G. Marcaud, X. Le Roux, P. Cheben, E. Cassan, D. Marris-Morini, F. Boeuf, C. Baudot, and L. Vivien, “L-shaped grating couplers engineered with subwavelength metamaterial for sub-decibel coupling loss,” In Proc.: 21st European Conference in Integrated Optics 2019 (ECIO 2019), Ghent, Belgium, April 2019.https://hal.archives-ouvertes.fr/hal-02539548
[13] D. Benedikovic, L. Virot, G. Aubin, J.-M. Hartmann, F. Amar, B. Szelag, B. Karakus, C. Alonso-Ramos, X. Le Roux, P. Crozat, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, J.-M. Fédéli, C. Kopp, and L. Vivien, “High-speed-performing pin photodetectors with lateral silicon-germanium-silicon heterojunctions for 1.55 μm communications,” In Proc.: 21st European Conference in Integrated Optics 2019 (ECIO 2019), Ghent, Belgium, April 2019. https://hal.archives-ouvertes.fr/hal-02539537
[14] D. Benedikovic, C. Alonso-Ramos, M. Nedeljkovic, J. Soler Penades, C. G. Littlejohns, A. Z. Khokhar, D. Perez-Galacho, P. Cheben, D. Marris-Morini, G. Z. Mashanovich, and L. Vivien, “Efficient fiber-chip coupling solutions for integrated mid-infrared nanophotonics,” In Proc.: Journees du GDR NanoTeraMIR (GDR NanoTeraMIR annual days) 2019, Saint-Raphael, France, June 2019.https://hal.archives-ouvertes.fr/hal-02539586
[15] D. Benedikovic, L. Virot, G. Aubin, J.-M. Hartmann, B. Szelag, F. Amar, X. Le Roux, C. Alonso-Ramos, P. Crozat, D. Marris-Morini, E. Cassan, C. Baudot, F. Boeuf, J.-M. Fédéli, C. Kopp, and L. Vivien, “High-speed germanium pin photodiodes integrated on silicon-on-insulator nanophotonic waveguides,” In Proc.: 16th IEEE International Conference on Group IV Photonics 2019 (GFP 2019), Singapore, Singapore, August 2019.https://hal.archives-ouvertes.fr/hal-02539561
[16] D. Benedikovic, C. Alonso-Ramos, S. Guerber, D. Perez-Galacho, X. Le Roux, V. Vakarin, G. Marcaud, P. Cheben, D. Marris-Morini, E. Cassan, C. Baudot, F. Boeuf, and L. Vivien, “Sub-decibel off-chip fiber couplers based on L-shaped waveguides and subwavelength grating metamaterials,” In Proc.: 16th IEEE International Conference on Group IV Photonics 2019 (GFP 2019), Singapore, Singapore, August 2019. https://hal.archives-ouvertes.fr/hal-02539569
[17] D. Benedikovic, L. Virot, G. Aubin, J.-M. Hartmann, F. Amar, B. Szelag, X. Le Roux, C. Alonso-Ramos, P. Crozat, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, J.-M. Fédéli, C. Kopp, and L. Vivien, “28 Gbps silicon-germanium hetero-structure avalanche photodetectors,” In Proc.: SPIE Photonics West 2020, San Francisco, California, USA, February 2020.https://hal.archives-ouvertes.fr/hal-02539646
[18] D. Benedikovic, C. Alonso-Ramos, S. Guerber, X. Le Roux, P. Cheben, B. Szelag, C. Dupre, D. Fowler, G. Marcaud, V. Vakarin, D. Perez-Galacho, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, and L. Vivien, “Silicon chip-integrated fiber couplers with sub-decibel loss,” In Proc.: SPIE Photonics West 2020, San Francisco, California, USA, February 2020.https://hal.archives-ouvertes.fr/hal-02539636
[19] D. Benedikovic, L. Virot, G. Aubin, J.-M. Hartmann, F. Amar, B. Szelag, X. Le Roux, C. Alonso-Ramos, P. Crozat, E. Cassan, D. Marris-Morini, C. Baudot, F. Boeuf, J.-M. Fedeli, C. Kopp, and L. Vivien, “Silicon-germanium p-i-n photodiodes with double heterojunction: high speed operation at 10 Gbps and beyond,” In Proc.: 22nd European Conference on Integrated Optics 2020 (ECIO 2020), Paris, France, June 2020.https://hal.archives-ouvertes.fr/hal-02539654
[20] M. Berciano, G. Marcaud, X. Le Roux, C. Alonso-Ramos, C. Lafforgue, P. Damas, D. Pérez-Galacho, D. Benedikovic, V. Vakarin, A. Ruiz-Caridad, P. Crozat, D. Marris-Morini, E. Cassan, and L. Vivien, "Fast electro-optics effect in strained silicon waveguide," In Proc.: SPIE Photonics West 2019, San Francisco, California, USA, February 2019. https://hal.archives-ouvertes.fr/hal-02936242
[21] M. Berciano, G. Marcaud, X. Le Roux, P. Crozat, C. Alonso-Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, P. Damas, and L. Vivien, "High-speed characteristics of strain-induced pockels effect in silicon," In Proc.: SPIE Photonics Europe 2018, Strasbourg, France, April 2018.https://hal.archives-ouvertes.fr/hal-02936249
[22] M. Berciano, G. Marcaud, P. Damas, X. Le Roux, C. Alonso-Ramos, D. Pérez-Galacho, V. Vakarin, P. Crozat, D. Benedikovic, D. Marris-Morini, E. Cassan, and L. Vivien, "High-speed Pockels effect in strained silicon waveguide," In Proc.: SPIE Photonics West 2018, San Francisco, California, USA, February 2018.https://hal.archives-ouvertes.fr/hal-02936258
[23] M. Berciano, P. Damas, G. Marcaud, X. Le Roux, P. Crozat, C. Alonso Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, L. Vivien, "Strained silicon photonics for Pockels effect based modulation," In Proc.: 14th IEEE International Conference on Group IV Photonics 2017 (GFP 2017), Berlin, Germany, August 2017.https://hal.archives-ouvertes.fr/hal-01803049
[24] M. Berciano, P. Damas, G. Marcaud, X. Le Roux, P. Crozat, C. Alonso-Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, and L. Vivien, "Strain-induced Pockels effect in silicon waveguides," In Proc.: SPIE Microtechnologies 2017, Barcelona, Spain, May 2017.https://hal.archives-ouvertes.fr/hal-01802962
[25] P. Damas, X. Le Roux, M. Berciano, G. Marcaud, C. Alonso-Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, and L. Vivien, "Second-order nonlinearities in strained silicon photonic structures," In Proc.: SPIE Photonics West 2017, San Francisco, California, USA, February 2017.https://hal.archives-ouvertes.fr/hal-01527436
[26] M. Berciano, P. Damas, X. Le Roux, G. Marcaud, P. Crozat, C. Alonso Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, and L. Vivien, "Pockels Effect in Strained Silicon Waveguides," In Proc.: 19th European Conference in Integrated Optics 2017 (ECIO 2017), Eindhoven, Netherlands, April 2017. https://hal.archives-ouvertes.fr/hal-01802963
[27] P. Damas, M. Berciano, X. Le-Roux, P. Crozat, C. Alonso Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, and L. Vivien, "Study of Pockels effect in strained silicon," In Proc.: The 2016 Spring Meeting of the European Materials Research Society (E-MRS Spring Meeting 2016), Lille, France, May 2016.https://hal.archives-ouvertes.fr/hal-01802964
[28] P. Damas, X. Le-Roux, M. Berciano, G. Marcaud, C. Alonso-Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, and L. Vivien, "Strain engineering of Pockels effect in silicon waveguides," In Proc.:18th IEEE Photonics North 2016, Québec city, Québec, Canada, May 2016.https://hal.archives-ouvertes.fr/hal-01527440
[29] P. Damas, X. Le-Roux, M. Berciano, D. Marris-Morini, E. Cassan, and L. Vivien, "Pockels effect in strained silicon," In Proc.: SPIE Photonics West 2016, San Francisco, California, USA, February 2016.https://hal.archives-ouvertes.fr/hal-01527448
[30] P. Damas, X. Le-Roux, M. Berciano, G. Marcaud, C. Alonso-Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, and L. Vivien, "Strained silicon photonics: Recent advances," 9th Sino-German Joint Symposium on Opto- and Microelectronic Devices and Circuits (SODC), 2016, Changchun, China.https://hal.archives-ouvertes.fr/hal-01527443
[31] M. Berciano, P. Damas, G. Marcaud, X. Le Roux, P. Crozat, C. Alonso Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, and L. Vivien, "Study of Pockels effect in strained silicon," In Proc.: IONS 2017, Palaiseau, Paris, France, 2017.https://hal.archives-ouvertes.fr/hal-01803058
[32] G. Marcaud, S. Serna, S. Matzen, C. Alonso-Ramos, X. Le Roux, M. Berciano, V. Pillard, P. Damas, T. Maroutian, G. Agnus, L. Largeau, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Yttria-Stabilized Zirconia waveguides for linear and nonlinear optics,". In Proc.: The 2018 Spring Meeting of the European Materials Research Society (E-MRS Spring Meeting 2018), Strasbourg, France, June 2018. https://hal.archives-ouvertes.fr/hal-01801168
[33] G. Marcaud, S. Serna, S. Matzen, C. Alonso-Ramos, X. Le Roux, M. Berciano, V. Pillard, P. Damas, T. Maroutian, G. Agnus, L. Largeau, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Functional oxide waveguidesfor nonlinear optics," In Proc.: SPIE Photonics Europe 2018, Strasbourg, France, April 2018.https://hal.archives-ouvertes.fr/hal-01801140
[34] G. Marcaud, S. Serna, S. Matzen, C. Alonso-Ramos, X. Le Roux, M. Berciano, V. Pillard, P. Damas, T. Maroutian, G. Agnus, L. Largeau, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Functional oxides forlinear and nonlinear optics," In Proc.: The 2018 Spring Meeting of the Materials Research Society (MRS Spring Meeting 2018), Phoenix, Arizona, United States of America, April 2018.https://hal.archives-ouvertes.fr/hal-01801128
[35] G. Marcaud, S. Matzen, C. Alonso-Ramos, X. Le Roux, M. Berciano, V. Pillard, P. Damas, T. Maroutian, G. Agnus, L. Largeau, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Functional oxides on Silicon and Sapphire substrates for photonic applications,". In Proc.: The 2017 Spring Meeting of the European Materials Research Society (E-MRS Spring Meeting 2017), Strasbourg, France, May 2017. https://hal.archives-ouvertes.fr/hal-01527612
[36] G. Marcaud, S. Matzen, C. Alonso-Ramos, X. Le Roux, M. Berciano, V. Pillard, P. Damas, T. Maroutian, G. Agnus, L. Largeau, D. Marris-Morini, E. Cassan, P. Lecoeur, and L. Vivien, "Functional oxides on Silicon and Sapphire substrates for photonic applications," In Proc.:19th IEEE Photonics North 2017, Ottawa, Ontario, Canada, June 2017.https://hal.archives-ouvertes.fr/hal-01527620
[37] G. Marcaud, S. Matzen, C. Alonso-Ramos, X. Le Roux, M. Berciano, V. Pillard, P. Damas, T. Maroutian, G. Agnus, L. Largeau, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Functional oxides induced strain for silicon photonics applications," In Proc.: SPIE Optics + Optoelectronics 2017, Prague, Czech Republic, April 2017. https://hal.archives-ouvertes.fr/hal-01527624
[38] G. Marcaud, S. Matzen, C. Alonso-Ramos, X. Le Roux, M. Berciano, V. Pillard, P. Damas, T. Maroutian, G. Agnus, L. Largeau, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Functional oxides on Silicon and Sapphire substrates for photonic applications," In Proc.: Towards Oxide-Based Electronics Spring Meeting 2017 (TO-BE Spring Meeting 2017), Luxembourg, Luxembourg, April 2017.https://hal.archives-ouvertes.fr/hal-01527626
[39] G. Marcaud, S. Matzen, C. Alonso-Ramos, X. Le Roux, P. Damas, V. Pillard, T. Maroutian, G. Agnus, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Oxides on Silicon and Sapphire substrates for photonic applications," In Proc.: The 2016 Spring Meeting of the European Materials Research Society (E-MRS Spring Meeting 2016), Lille, France, May 2016. https://hal.archives-ouvertes.fr/hal-01527614
[40] G. Marcaud, S. Matzen, C. Alonso-Ramos, X. Le Roux, P. Damas, M. Berciano, V. Pillard, T. Maroutian, G. Agnus, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Functional oxides on Silicon and Sapphire substrates for photonic applications," In Proc.: EPIXfab-plat4M Silicon Photonics Summer School, Ghent, Belgium, August-September 2016. https://hal.archives-ouvertes.fr/hal-01527631
[41] S. Guerber, C. Alonso-Ramos, D. Perez-Galacho, X. Le Roux, N. Vulliet, S. Crémer, D. Marris-Morini, F. Boeuf, L. Vivien, and C. Baudot, “Design and Integration of an O-band Silicon Nitride AWG for CWDM Applications,” In Proc.: 14th IEEE International Conference on Group IV Photonics 2017 (GFP 2017), Berlin, Germany, August 2017.https://hal.archives-ouvertes.fr/hal-02927097
[42] S. Guerber, C Alonso-Ramos, D Benedikovic, D. Perez-Galacho, X. Le Roux, N. Vulliet, S. Crémer, L. Babaud, J. Planchot, D. Benoit, P. Chantraine, F. Leverd, D. Ristoiu, P. Grosse, D. Marris-Morini, L. Vivien, C. Baudot, and F. Boeuf, “Integrated SiN on SOI dual photonic devices for advanced datacom solutions,” In Proc.: SPIE Photonics Europe 2018, Strasbourg, France, April 2018.https://hal.archives-ouvertes.fr/hal-02927100
[43] A. Ruiz-Caridad, G. Marcaud, J. M. Ramírez, L. Largeau, T. Maroutian, S. Matzen, C. Alonso-Ramos, G. Agnus, S. Guerber, C. Baudot, F. Boeuf, V. Vakarin, E. Durán-Valdeiglesias, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Optical gain evaluation on rare-earth doped Yttria-stabilized zirconia for hybrid integration on silicon photonics platforms," In Proc.: SPIE Optics + Optoelectronics 2019, Prague, Czech Republic, April 2019.https://hal.archives-ouvertes.fr/hal-02415807
[44] A. Ruiz-Caridad, G. Marcaud, J. M. Ramirez, L. Largeau, T. Maroutian, S. Matzen, C. Alonso-Ramos, G. Agnus, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Towards optical amplification in com-plex functional oxides: exploring optical gain in erbium-doped yttria-stabilized zirconia waveguides," In Proc.: SPIE Photonics West 2019, San Francisco, California, USA, February 2019.https://hal.archives-ouvertes.fr/hal-02415797/
[45] A. Ruiz-Caridad, G. Marcaud, J. Zhang, C. Lafforgue, J. M. Ramirez, E. Durán-Valdeiglesias, L. Largeau, T. Maroutian, S. Matzen, S. Collin, C. Alonso-Ramos, G. Agnus, S. Guerber, C. Baudot, F. Boeuf, V. Vakarin, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Erbium-doped oxide for optical gain on hybrid silicon photonics platforms," In Proc.: 22nd European Conference on Integrated Optics 2020 (ECIO 2020), Paris, France, June 2020.
[46] A. Ruiz-Caridad, G. Marcaud, J. M. Ramirez, L. Largeau, T. Maroutian, S. Matzen, C. Alonso-Ramos, G. Agnus, S. Guerber, C. Baudot, F. Boeuf, V. Vakarin, E. Duran-Valdeiglesias, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Erbium-doped Yttria-Stabilized Zirconia Thin Layers for Photonic Applications," In Proc.: 21st European Conference in Integrated Optics 2019 (ECIO 2019), Ghent, Belgium, April 2019.
[47] A. Ruiz-Caridad, G. Marcaud, J. M. Ramirez, E. Durán-Valdeiglesias, C. Lafforgue, J. Zhang, L. Largeau, T. Maroutian, S. Matzen, C. Alonso-Ramos, S. Collin, G. Agnus, S. Guerber, C. Baudot, F. Boeuf, S. Monfray, S. Crémer, V. Vakarin, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Erbium-doped yttria-stabilised zirconia thin films grown by pulsed laser deposition for photonic applications," In Proc.: The 2019 Spring Meeting of the European Materials Research Society (E-MRS Spring Meeting 2019), Nice, France, May 2019.
[48] A. Ruiz-Caridad, G. Marcaud, J. Zhang, C. Lafforgue, J. M. Ramirez, E. Durán-Valdeiglesias, L. Largeau, T. Maroutian, S. Matzen, S. Collin, C. Alonso-Ramos, G. Agnus, S. Guerber, C. Baudot, F. Boeuf, V. Vakarin, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Erbium-doped oxide thin films for silicon photonic applications," In Proc.: RIAO Conference, Cancun, Mexico, September 2019.
[49] A. Ruiz-Caridad, C. Lafforgue, G. Marcaud, J. M. Ramirez, L. Largeau, T. Maroutian, S. Matzen, C. Alonso-Ramos, G. Agnus, S. Guerber, C. Baudot, F. Boeuf, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Exploring nonlinear optics effects on rare-earth doped yttria-stabilized zirconia on silicon nitride photonic platform," Nonlinear Photonics Winter School, Trento, Italy, January 2019.
[50] A. Ruiz-Caridad, G. Marcaud, J. M. Ramirez, L. Largeau, T. Maroutian, S. Matzen, S. Collin, C. Alonso-Ramos, G. Agnus, E. Cassan, D. Marris-Morini, P. Lecoeur, and L. Vivien, "Engineering erbium-doped oxide thin layers for integrated optics," International School of Oxide Electronics, Cargèse, France, August 2019.
[51] C. Lafforgue, M. Berciano, G. Marcaud, X. Le Roux, C. Alonso-Ramos, D. Perez-Galacho, D. Benedikovic, V. Vakarin, A. Ruiz-Caridad, P. Crozat, D. Marris-Morini, E. Cassan, and L. Vivien, "Analysis of second order nonlinearity in strained silicon waveguides," In Proc.: SPIE Optics + Optoelectronics 2019, Prague, Czech Republic, April 2019.
[52] C. Lafforgue, S. Guerber, X. Le Roux, J. M. Ramirez, G. Marcaud, C. Alonso-Ramos, D. Marris-Morini, E. Cassan, C. Baudot, F. Bœuf, S. Cremer, S. Monfray, and L. Vivien, "Two-octaves spanning supercontinuum generation in nitrogen-rich silicon nitride," In Proc.:21th IEEE Photonics North 2019, Québec city, Québec, Canada, May 2019.https://hal.archives-ouvertes.fr/hal-02933340
[53] C. Lafforgue, M. Berciano, G. Marcaud, X. Le Roux, C. Alonso-Ramos, D. Perez-Galacho, D. Benedikovic, V. Vakarin, A. Ruiz-Caridad, P. Crozat, D. Marris-Morini, E. Cassan, L. Vivien, "Analyse des non-linéarités optiques d’ordre deux dans le silicium contraint," In Proc.: Journées nationales de l’optique guidée 2019 (JNOG 2019), Palaiseau, France, June 2019.https://hal.archives-ouvertes.fr/hal-02933279v1
[54] C. Lafforgue, M. Berciano, L. Deniel, G. Marcaud, X. Le Roux, C. Alonso-Ramos, D. Benedikovic, V. Vakarin, A. Ruiz-Caridad, P. Crozat, D. Marris-Morini, E. Cassan, and L. Vivien, "Strain induced Pockels effect in silicon for electro-optic modulation," In Proc.: SPIE Photonics West 2020, San Francisco, California, USA, February 2020.https://hal.archives-ouvertes.fr/hal-02933344
[55] C. Lafforgue, M. Berciano, L. Deniel, G. Marcaud, X. Le Roux, C. Alonso-Ramos, D. Benedikovic, V. Vakarin, A. Ruiz-Caridad, P. Crozat, D. Marris-Morini, E. Cassan, and L. Vivien, "Strain-induced electro-optical effect in silicon Mach-Zehnder modulators," In Proc.: 22nd European Conference on Integrated Optics 2020 (ECIO 2020), Paris, France, June 2020.https://hal.archives-ouvertes.fr/hal-02933286
[56] C. Lafforgue, M. Berciano, L. Deniel, G. Marcaud, X. Le Roux, C. Alonso- Ramos, D. Benedikovic, V. Vakarin, A. Ruiz-Caridad, P. Crozat, D. Marris-Morini, E. Cassan, and L. Vivien, "High-speed optical modulation based on Pockels effect in strained silicon waveguides," In Proc.: Conference on Lasers and Electro-Optics 2020 (CLEO 2020), Washington, DC, United States, May 2020.https://hal.archives-ouvertes.fr/hal-02941661
Book chapter:
[1] L. Vivien, C. Baudot, F. Boeuf, B. Szelag, C. Alonso-Ramos, D. Benedikovic, D. Marris-Morini, E. Cassan, S. Guerber, M. Douix, L. Virot, P. Rodriguez, F. Nemouchi, C. Jany, B. Ben Bakir, X. Le Roux, D. Perez-Galacho, M. Berciano, G. Marcaud, I. Charlet, L. Deniel, C. Lafforgue, J. Zhang, S. Serna, P. Damas, P. T. Do, D. Oser, J. Durel, E. Ghegin, V. Vakarin, J.-M. Ramirez, S. Monfray, S. Cremer, E. Duran Valdeiglesias, L. Sanchez, F. Fournel, P.Brianceau, K. Hassan, “SEMICONDUCTORS AND SEMIMETALS: Future Directions in Silicon Photonics,” EDITED BY: Sebastian Lourdudoss, John E. Bowers, and Chennupati Jagadish, Elsevier Academic Press, Volume 101, CHAPTER 1: “Building blocks of silicon photonics,” pp. 1 – 42, August 2019.https://hal.archives-ouvertes.fr/hal-02932083
