Partners
Université Paris Sud/CNRS : Centre de Nanosciences et de Nanotechnologies (C2N)
Politecnico Di Milano / L-Ness

Resume
Mid-infrared (mid-IR) spectroscopy is a nearly universal way to identify chemical and biological substances, as most of the molecules have their vibrational and rotational resonances in the mid-IR wavelength range. Commercially available mid-IR systems are based on bulky and expensive equipment, while lots of efforts are now devoted to the reduction of their size down to chip-scale dimensions. The demonstration of mid-IR photonic circuits on silicon chips will benefit from reliable and high-volume fabrication to offer high performance, low cost, compact, low weight and power consumption photonic circuits, which is particularly interesting for mid-IR spectroscopic sensing systems that need to be portable and low cost.

In this context, the INsPIRE project will address a new route towards key advances in the development of chip-scale integrated circuits on silicon for the mid-IR wavelength range. The original idea is to use nonlinear optical properties in Ge/SiGe quantum well (QW) active devices combined with Ge-rich-SiGe waveguides. The objectives of the INsPIRE project are far beyond the state of the art, by targeting the monolithic integration of passive and active devices for operation in the 3 to 15 µm wavelength range. As a main cornerstone we will demonstrate an optical photonic circuit based on Ge/SiGe QWs relying on a mid-IR light emitter combined with a mid-IR spectrometer and a detector array. The integration will be performed using Ge-rich-SiGe waveguides allowing the extension of the wavelength range up to 15 µm. Such demonstration, which will constitute a breakthrough for establishing chip-scale circuits for the mid-IR photonics, requires a deep knowledge and understanding of Ge/SiGe optical properties. In particular, second- and third-order nonlinear optical properties of Ge/SiGe QW structures will be investigated in a wide spectral range from 3 to 15 µm.

 News 
    - PhD or post-doc positions avaiblable !! : Contact: Delphine Marris-Morini 


The team:  

INsPIRE team - Sep. 2019 From left to right : M. Montesinos-Ballester, Qiankun Liu , Giovanni Isella, Jacopo Frigerio, Andrea Ballabio, Delphine Marris-Morini

 

 

INsPIRE team - Oct. 2016 From left to right : Daniel Chrastina, Jacopo Frigerio, Andrea Ballabio, Joan Manel Ramirez, Vladyslav Vakarin, Papichaya Chaisakul, Delphine Marris-Morini, Giovanni Isella, and seated in front : Qiankun Liu 


Publications

Articles in journals

  • M. Montesinos-Ballester, V. Vakarin, J M Ramirez, Q. Liu, C. Alonso-Ramos, X. Le Roux, J. Frigerio, A. Ballabio, A. Barzaghi, L. Deniel, D. Bouville, L. Vivien, G. Isella, D. Marris-Morini, Optical modulation in Ge-rich SiGe waveguides in the mid-infrared wavelength range up to 11 μm, Communications Materials, 1, 6 (2020), https://doi.org/10.1038/s43246-019-0003-8
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  • M. Montesinos-Ballester, Q. Liu, V. Vakarin, J M. Ramirez, C. Alonso-Ramos, X. Le Roux, J. Frigerio, A. Ballabio, E. Talamas, L. Vivien, G. Isella, D. Marris-Morini, On-chip Fourier-transform spectrometer based on spatial heterodyning tuned by thermooptic effect, Scientific Reports, 9, 14633 (2019) https://doi.org/10.1038/s41598-019-50947-x
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  • V. Vakarin, W.N. Ye, J.M. Ramirez, Q. Liu, J. Frigerio, A. Ballabio, G. Isella, L. Vivien, C. Alonso-Ramos, P. Cheben, D. Marris-Morini, Ultra-wideband Ge-rich silicon germanium mid-infrared polarization rotator with mode hybridization flattening, Optics Express 27 (7), 9838 (2019). https://doi.org/10.1364/OE.27.009838
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  • J-M. Ramirez, Q. Liu, V. Vakarin, X. Le Roux, J. Frigerio, A. Ballabio, C. Alonso Ramos, E. Talamas Simola, L. Vivien, G. Isella, D. Marris-Morini, Broadband integrated racetrack ring resonators for long-wave infrared photonics Optics Letters, 44 (2), 407 (2019). https://doi.org/10.1364/OL.44.000407 https://hal.archives-ouvertes.fr/hal-01983394
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  • Q. Liu, J M. Ramirez, V. Vakarin, X. Le Roux, J. Frigerio, A. Ballabio, E. Talamas Simola, C. Alonso Ramos, D. Benedikovic, D. Bouville, L. Vivien, G. Isella, D. Marris-Morini, On-chip Bragg grating waveguides and Fabry-Perot resonators for long-wave infrared operation up to 8.4 μm Optics Express 26 (26), 34366 (2018). https://doi.org/10.1364/OE.26.034366
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  • Q. Liu, J.M. Ramirez, V. Vakarin, X. Le Roux, C. Alonso-Ramos, J. Frigerio, A. Ballabio, E. Talamas Simola, D. Bouville, L. Vivien, G. Isella, D. Marris-Morini, Integrated broadband dual-polarization Ge-rich SiGe mid-infrared Fourier-Transform spectrometer, Optics Letters, 43 (20), 5021-5024 (2018). https://doi.org/10.1364/OL.43.005021 https://hal.archives-ouvertes.fr/hal-01891844v1
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  • D. Marris-Morini, V. Vakarin, J-M. Ramirez, Q. Liu, A. Ballabio, J. Frigerio, M. Montesinos, C. Alonso-Ramos, X. Le Roux, S. Serna, D. Benedikovic, D. Chrastina, L. Vivien and G. Isella, Germanium-based integrated photonics from near- to mid-infrared applications Nanophotonics, (2018) invited review paper. https://doi.org/10.1515/nanoph-2018-0113
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  • Vladyslav Vakarin, Joan Manel Ramírez, Jacopo Frigerio, Qiankun Liu, Andrea Ballabio, Xavier Le Roux, Carlos Alonso-Ramos, Giovanni Isella, Pavel Cheben, Winnie N. Ye, Laurent Vivien and Delphine Marris-Morini, Wideband Ge-Rich SiGe Polarization-Insensitive Waveguides for Mid-Infrared Free-Space Communications Appl. Sci. 2018, 8, 1154. https://doi.org/10.3390/app8071154
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  • Q. Liu, J. Manel Ramirez, V. Vakarin, X. Le Roux, A. Ballabio, J. Frigerio, D. Chrastina, G. Isella, D. Bouville, L. Vivien, C. Alonso Ramos, D. Marris-Morini, Mid-infrared sensing between 5.2 and 6.6 μm wavelengths using Ge-rich SiGe waveguides [Invited], Optical Materials Express, 8 (5), 1305 (2018) https://doi.org/10.1364/OME.8.001305
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  • J.M. Ramirez, Q. Liu, V. Vakarin, J. Frigerio, A. Ballabio, X. Le Roux, D. Bouville, L. Vivien, G. Isella, D. Marris-Morini Graded SiGe waveguides with broadband low loss propagation in the mid infrared Optics Express, 26 (2), 870, (2018) https://doi.org/10.1364/OE.26.000870
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  • S. Serna, V. Vakarin, J.-M. Ramirez, J. Frigerio, A. Ballabio, X. Le Roux, L. Vivien, G. Isella, E. Cassan, N. Dubreuil, D. Marris-Morini, Nonlinear Properties of Ge-rich Si1-xGex Materials with Different Ge Concentrations, Scientific reports, 7, 14692 (2017) https://doi.org/10.1038/s41598-017-15266-z
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  • V. Vakarin, J-M. Ramirez, J. Frigerio, A. Ballabio, X. Le Roux, Q. Liu, D. Bouville, L. Vivien, G. Isella, D. Marris-Morini, Ultra-wideband Ge-rich silicon germanium integrated Mach–Zehnder interferometer for mid-infrared spectroscopy Optics Letters Vol. 42 n°17, 3482-3485 (2017) https://doi.org/10.1364/OL.42.003482 https://hal.archives-ouvertes.fr/hal-01579360
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  • J.M. Ramirez, V. Vakarin, J. Frigerio, P. Chaisakul, D. Chrastina, X. Le Roux, A. Ballabio, L. Vivien, G. Isella, D. Marris-Morini, Ge-rich graded-index Si1-xGex waveguides with broadband tight mode confinement and flat anomalous dispersion for nonlinear mid-infrared photonics, Optics Express 25 (6) 6561 (2017) . https://doi.org/10.1364/OE.25.006561
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  • J.M. Ramirez, V. Vakarin, C. Gilles, J. Frigerio, A. Ballabio, P. Chaisakul, X. Le Roux, C. Alonso-Ramos, G. Maisons, L. Vivien, M. Carras, G. Isella, D. Marris-Morini, Low-loss Ge-rich Si0.2Ge0.8 waveguides for mid-infrared photonics, Optics Letters 42 (1) 105 (2017). https://doi.org/10.1364/OL.42.000105 https://hal.archives-ouvertes.fr/hal-01430021
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  • J. Frigerio, V. Vakarin, P. Chaisakul, A. Ballabio, D. Chrastina, M. Leone, X. Le Roux, L. Vivien, G. Isella, and D. Marris-Morini, Electro-Refraction in Standard and Symmetrically Coupled Ge/SiGe Quantum Wells, Nanosci. Nanotechnol. Lett. 9, 1123–1127 (2017) https://doi.org/10.1166/nnl.2017.2443
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  • V. Vakarin, P. Chaisakul, J. Frigerio, A. Ballabio, X. Le Roux, J-R. Coudevylle, D. Bouville, D. Perez-Galacho, L. Vivien, G. Isella, and D. Marris-Morini, Sharp bends and Mach-Zehnder interferometer based on Ge-rich-SiGe waveguides on SiGe graded buffer Optics Express, 23 (24) 30821-30826 (2015). https://doi.org/10.1364/OE.23.030821
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  • J. Frigerio, V. Vakarin, P. Chaisakul, M. Ferretto, D. Chrastina, X. Le Roux, L. Vivien, G.Isella and D. Marris-Morini, Giant electro-optic effect in Ge/SiGe coupled quantum wells Scientific reports 5, 15398 (2015). https://doi.org/10.1038/srep15398
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    Invited communications in international conferences

  • D. Marris-Morini, V. Vakarin, Q. Liu, J. M. Ramirez, A. Ballabio, J. Frigerio, X. Le Roux, Samuel Serna, D. Benedikovic, C. Alonso-Ramos, G. Isella, and L. Vivien, "Ge-rich SiGe photonic integrated circuits for mid-IR spectroscopy" SPIE Photonics West, San Francisco, USA, jan-fev 2018. https://hal.archives-ouvertes.fr/hal-01798825
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  • J. Frigerio, J.- M. Ramírez, A. Ballabio, V. Vakarin, P. Chaisakul, C. Gilles, Q. Liu, G. Maisons, X. Le Roux, L. Vivien, M. Carras, G. Isella and D. Marris-Morini, ,“Mid-infrared integrated photonics with Ge-rich SiGe waveguides”, Semicon Nano 2017, Como, Italy, Sep 2017 https://hal.archives-ouvertes.fr/hal-01618785
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  • J-M Ramírez, V. Vakarin, P. Chaisakul, J. Frigerio,A. Ballabio, C. Gilles,D. Chrastina,Q. Liu,G. Maisons,X. Le Roux,L. Vivien,M. Carras, G. Isella,D. Marris-Morini, Ge-rich SiGe waveguides for mid-infrared photonics, SPIE Photonics West, San Francisco, USA, jan-fev 2017. https://hal.archives-ouvertes.fr/hal-01616379v1
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  • D. Marris-Morini, Silicon photonics for high performance optical communications and sensing applications, IONS 2017 (The International OSA Network of Students) 14-17 june 2017, Paris, France.
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  • D. Marris-Morini, V. Vakarin, P. Chaisakul, J. Frigerio, M. Rahman, J. M. Ramírez, D. Chrastina, X. Le Roux, L. Vivien, G. Isella, High-speed modulators and photodetectors based on Ge/SiGe Quantum Wells, E-MRS Fall Meeting, September 19 to 22, 2016, Warsaw (Poland) https://hal.archives-ouvertes.fr/hal-01388117
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  • D. Marris-Morini, V. Vakarin, P. Chaisakul, J. Frigerio, M. Rahman, J. M. Ramírez, M-S. Rouifed, D. Chrastina, X. Le Roux, G. Isella, L. Vivien, Silicon Photonics Based on Ge/SiGe Quantum Well Structures, 18th International Conference on transparent Optical Networks (ICTON 2016) https://hal.archives-ouvertes.fr/hal-01388130
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  • D. Marris-Morini, P. Chaisakul, J. Frigerio, M-S. Rouifed, V. Vakarin, D. Chrastina, X. Le Roux, G. Isella, L. Vivien, Silicon Photonics Based on Ge/SiGe Quantum Well Structures Asia Communications and Photonics Conference (ACP), 19-23 novembre 2015, Hong Kong. https://hal.archives-ouvertes.fr/hal-01322042v1
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  • D. Marris-Morini, V. Vakarin, P. Chaisakul, M-S. Rouifed, J. Frigerio, D. Chrastina, S. Cecchi, G. Isella, L.Vivien, Ge/SiGe Quantum well optical modulator 25th international conference on Solid State Device and Materials (SSDM), Sapporo, Japan 27-30 september 2015 https://hal.archives-ouvertes.fr/hal-01322037v1
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  • D. Marris-Morini, P. Chaisakul, J. Frigerio, M-S. Rouifed, V. Vakarin, D. Chrastina, X. Le Roux, G. Isella, L. Vivien, Silicon photonics based on Ge/SiGe quantum well, IEEE Group IV Photonics, august 2015, Vancouver (Canada) https://hal.archives-ouvertes.fr/hal-01322023v1
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    Communications in international conferences

  • Joan Manel Ramírez, Qiankun Liu, Vladyslav Vakarin,Jacopo Frigerio, Andrea Ballabio, Xavier Le Roux, Laurent Vivien, Giovanni Isella, Delphine Marris-Morini A compact Ge-rich graded-index SiGe platform with broadband low-loss propagation in the mid infrared, OSA High-brightness Sources and Light-driven Interactions Congress (Mid-Infrared Coherent Sources MICS Strasbourg, mars 2018)
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  • Qiankun Liu, Joan Manel Ramírez, Vladyslav Vakarin, Jacopo Frigerio, Andrea Ballabio, Xavier Le Roux, Laurent Vivien, Carlos Alonso-Ramos, Giovanni Isella, Delphine Marris-Morini, Mid-IR integrated cavity based on Ge-rich graded SiGe waveguides with lateral Bragg grating, OSA High-brightness Sources and Light-driven Interactions Congress (Mid-Infrared Coherent Sources MICS Strasbourg, mars 2018)
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  • S. Serna, V. Vakarin, J. M. Ramirez, X. Le Roux, J. Frigerio, A. Ballabio, L. Vivien, G. Isella, E. Cassan, N. Dubreuil, D. Marris-Morini, Third Order Nonlinear Optical Properties of Ge-Rich SiGe Waveguides, IEEE Group IV Photonics, 23-25 august 2017, Berlin (Germany) https://hal.archives-ouvertes.fr/hal-01617226v1
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  • V. Vakarin, J. –M. Ramirez, Q. Liu, X. Le Roux, J. Frigerio, A. Ballabio, L. Vivien, G. Isella, D. Marris-Morini, Broadband Mid Infrared Photonic Integrated components using a Ge-rich SiGe platform, IEEE Group IV Photonics, 23-25 august 2017, Berlin (Germany) https://hal.archives-ouvertes.fr/hal-01617229v1
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  • S. Serna, V. Vakarin, J.M. Ramirez, J. Frigerio, A. Ballabio, L.Vivien, G. Isella, E. Cassan, N. Dubreuil, D. Marris-Morini, Nonlinear properties of Ge-rich SiGe waveguides, 2017 CLEO Pacific Rim Conference 31 Jul 2017 - 04 Aug 2017, Singapore https://hal.archives-ouvertes.fr/hal-01617233v1
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  • V. Vakarin; Papichaya Chaisakul; Jacopo Frigerio; Andrea Ballabio; Joan Manel Ramírez; Xavier Le Roux; Jean-René Coudevylle; Laurent Vivien; Giovanni Isella; Delphine Marris-Morini, Polarization insensitive Ge-rich silicon germanium waveguides for optical interconnects on silicon, SPIE optics + Optoelectronics, 24-27 avril 2017 Pragues, Czech Republic, Proc. SPIE 10242; doi: 10.1117/12.2265431 Best student paper https://hal.archives-ouvertes.fr/hal-01617222v1
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  • J.-M. Ramirez, V. Vakarin, J. Frigerio, Q. Liu, A. Ballabio, P. Chaisakul, X. Le Roux, L. Vivien, G. Isella, D. Marris-Morini, Ge-rich graded-index SiGe waveguides as enabling building blocks for broadband mid Infrared integrated photonics, European Conference on Integrated Optics, April 03-05, 2017, Eindhoven, the Netherlands. https://hal.archives-ouvertes.fr/hal-01617217v1
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  • J. M. Ramírez, V. Vakarin, Q. Liu, A. Ballabio, J. Frigerio, P. Chaisakul, D. Chrastina, X. Le Roux, C. Gilles, G. Maisons, M. Carras, L. Vivien, G. Isella, D. Marris-Morini, Broadband mid infrared Ge-rich SiGe waveguides and Mach-Zehnder interferometric devices: design, fabrication and characterization, E-MRS Fall Meeting, 18-21 september 2017, Warsaw (Poland) https://hal.archives-ouvertes.fr/hal-01617242v1
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  • Q. Liu, J.-M. Ramírez, V. Vakarin, D. Perez-Galacho, C. Alonso-Ramos, D. Benedikovic, J. Frigerio, A. Ballabio, G. Isella, L. Vivien, D. Marris-Morini, Design of Fabry-Perot grating cavity based on Ge-rich graded SiGe waveguide for Mid-IR, IONS 2017 (The International OSA Network of Students) 14-17 june 2017, Paris https://hal.archives-ouvertes.fr/hal-01617244v1
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  • Q. Liu, J.-M. Ramírez, V. Vakarin, D. Perez-Galacho, C. Alonso-Ramos, D. Benedikovic, L. Vivien, D. Marris-Morini, J. Frigerio, A. Ballabio, G. Isella, Design of Mid-IR integrated Fabry-Perot cavity based on Ge-rich graded SiGe waveguides, Photonics North, 6-8 june 2017 Ottawa (Canada) https://hal.archives-ouvertes.fr/hal-01617247v1
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  • J. M. Ramírez, V. Vakarin, M. Rahman, P. Chaisakul, X. Le Roux, L. Vivien, Daniel Chrastina, Jacopo Frigerio, Giovanni Isella, D. Marris-Morini Broadband single mode SiGe graded waveguides with tight mode confinement for mid-infrared photonics 18th Photonics North Conference, 24-26 May 2016, Québec City (Canada) https://hal.archives-ouvertes.fr/hal-01322082v1
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  • M. Rahman, E. Durán Valdeiglesias, V. Vakarin, J. Frigerio, J. M. Ramírez, D. Chrastina, P. Chaisakul, X. Le Roux, L. Vivien, G. Isella and D. Marris-Morini, Investigation of Ge/SiGe Quantum Well properties by room temperature photoluminescence, E-MRS Spring Meeting, 2-6 May 2016, Lille (France) https://hal.archives-ouvertes.fr/hal-01322078v1
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  • J. Frigerio, V. Vakarin, P. Chaisakul, D. Chrastina, X. Le Roux, L. Vivien, G. Isella, D. Marris-Morini Electro-absorption and electro-refraction in Ge/SiGe coupled quantum wells SPIE Photonics Europe, 3-7 April 2016, Brussels (Belgium) https://hal.archives-ouvertes.fr/hal-01326155v1
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  • V. Vakarin, P. Chaisakul,J. Frigerio, A. Ballabio, X. Le Roux, J-R. Coudevylle, L.Vivien, G. Isella, D. Marris-Morini Ge-rich silicon germanium on graded buffer as a new platform for optical interconnects on silicon SPIE Photonics Europe, 3-7 April 2016, Brussels (Belgium) Best student conference presentation https://hal.archives-ouvertes.fr/hal-01322121v1
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  • V. Vakarin, P. Chaisakul, J. Frigerio, A. Ballabio, X. Le Roux, J-R. Coudevylle, L. Vivien, G. Isella, and D. Marris-Morini, * Silicon germanium on graded buffer as a new platform for optical interconnects on silicon, SPIE Photonics West, 16–18 February 2016, San Francisco (USA) https://hal.archives-ouvertes.fr/hal-01322066v1
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  • J. Frigerio, V. Vakarin, P. Chaisakul, M. Ferretto, D. Chrastina, G. Isella, X. Le Roux, L. Vivien and D. Marris-Morini, Electro-refractive effect in symmetrically coupled Ge/SiGe quantum wells, IEEE Group IV Photonics, Vancouver Canada, 26-28 aout 2015. Post deadline paper https://hal.archives-ouvertes.fr/hal-01322131v1
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